LOW-LOSS OPTICAL-WAVEGUIDES USING PLASMA-DEPOSITED SILICON-NITRIDE

被引：14
|
作者：
SRIRAM, S
PARTLOW, WD
LIU, CS
机构：
来源：
APPLIED OPTICS | 1983年 / 22卷 / 23期
关键词：
D O I：
10.1364/AO.22.003664
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：3664 / 3665
页数：2
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