RESIDUAL-GAS BEAM PROFILE MONITOR

被引:16
|
作者
KRIDER, J
机构
关键词
D O I
10.1016/0168-9002(89)91188-1
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:660 / 663
页数:4
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