PREVENTION OF THERMAL SURFACE DAMAGE IN THE HIGH-TEMPERATURE ANNEALING OF GAAS

被引：0
|
作者：
CAMPBELL, PM [1 ]
机构：
[1] USN,RES LAB,WASHINGTON,DC 20375
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 08期
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D O I：
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C349 / C349
页数：1
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