THE APPLICATION OF SECONDARY ION MASS-SPECTROMETRY TO SURFACE-ANALYSIS OF SEMICONDUCTOR SUBSTRATES AND DEVICES

被引：11

|

作者：

BROWN, A

VANDENBERG, JA

VICKERMAN, JC

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1986年 / 9卷 / 1-6期

关键词：

D O I：

10.1002/sia.740090508

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：309 / 317

页数：9

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