GROWTH OF ULTRATHIN SILVER FILMS BY EXCIMER-LASER-INDUCED DECOMPOSITION OF SILVER ACETATE IN AIR

被引：10
|
作者：
LU, YF
TAKAI, M
SHIOKAWA, T
AOYAGI, Y
机构：
[1] OSAKA UNIV, FAC ENGN SCI, DEPT ELECT ENGN, TOYONAKA, OSAKA 560, JAPAN
[2] INST PHYS & CHEM RES, SEMICOND LAB, WAKO, SAITAMA 35101, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1994年 / 33卷 / 9B期
关键词：
EXCIMER LASER; SILVER THIN FILM; LASER DEPOSITION; SILVER ACETATE; PHOTODECOMPOSITION;
D O I：
10.1143/JJAP.33.L1313
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Excimer-laser-induced deposition of silver film from a silver acetate (CH3COOAg) has been investigated. Ultrathin silver film with a thickness of nanometer order can be obtained by excimer-laser-induced decomposition of silver acetate in air. The decomposition reaction is photochemical. Smooth thin film without grains and other microstructures can be obtained by this process. Almost pure silver in the deposited thin film has been achieved. This method provides a way to grow silver thin film on different substrate materials such as Mn-Zn ferrite, glass and metals.
引用
收藏
页码：L1313 / L1315
页数：3
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