4-PROBE METHOD IN SURFACE-RESISTANCE MEASUREMENT FOR EPITAXIAL THIN-FILMS

被引：0
|
作者：
BATAVIN, VV
ZHAVORONKOV, NV
机构：
来源：
INDUSTRIAL LABORATORY | 1982年 / 48卷 / 08期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：811 / 814
页数：4
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