4-PROBE METHOD IN SURFACE-RESISTANCE MEASUREMENT FOR EPITAXIAL THIN-FILMS

被引：0

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作者：

BATAVIN, VV

ZHAVORONKOV, NV

机构：

来源：

INDUSTRIAL LABORATORY | 1982年 / 48卷 / 08期

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暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

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页码：811 / 814

页数：4

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