PREPARATION OF DIAMOND-LIKE CARBON-FILMS BY ELECTRON-CYCLOTRON RESONANCE CHEMICAL VAPOR-DEPOSITION

被引：54
|
作者：
NAGAI, I [1 ]
ISHITANI, A [1 ]
KURODA, H [1 ]
YOSHIKAWA, M [1 ]
NAGAI, N [1 ]
机构：
[1] TORAY RES CTR LTD,OTSU,SHIGA 520,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 06期
关键词：
D O I：
10.1063/1.345428
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Diamondlike carbon films were prepared by electron cyclotron resonance chemical vapor deposition. Structures of the carbon films were characterized by Raman spectroscopy and Fourier-transform infrared spectroscopy. The relationship between the properties of films and growth conditions has been examined. High-energy ion species extracted from a discharge of methane in the electron cyclotron resonance cavity, which is positively-biased electrically against the earthed substrate, have an important role in the growth behavior of hard diamondlike carbon films.
引用
收藏
页码：2890 / 2893
页数：4
相关论文
共 50 条
  • [1] ELECTRON-CYCLOTRON RESONANCE DEPOSITION OF DIAMOND-LIKE FILMS
    SHING, YH
    POOL, FS
    [J]. VACUUM, 1990, 41 (4-6) : 1368 - 1370
  • [2] DIAMOND-LIKE CARBON-FILMS SPUTTER DEPOSITED WITH AN ELECTRON-CYCLOTRON RESONANCE REACTOR
    KIDDER, JN
    VARHUE, WJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 1414 - 1422
  • [3] DIAMOND-LIKE CARBON-FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION
    RAY, S
    MIDDYA, AR
    BARUA, AK
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (10B): : L1559 - L1561
  • [4] PREPARATION OF TIN FILMS BY ELECTRON-CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR-DEPOSITION
    AKAHORI, T
    TANIHARA, A
    TANO, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (12B): : 3558 - 3561
  • [5] DEPOSITION OF DIAMOND-LIKE FILMS BY ELECTRON-CYCLOTRON RESONANCE MICROWAVE PLASMAS
    POOL, FS
    SHING, YH
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (01) : 62 - 65
  • [6] DEPOSITION OF DIAMOND-LIKE CARBON-FILMS USING ELECTRON-CYCLOTRON-RESONANCE PLASMA CHEMICAL-VAPOR-DEPOSITION FROM ETHYLENE GAS
    SUZUKI, J
    OKADA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1995, 34 (9B): : L1218 - L1220
  • [7] THE EFFECT OF RADIO-FREQUENCY SUBSTRATE BIASING IN THE DEPOSITION OF DIAMOND-LIKE CARBON-FILMS IN AN ELECTRON-CYCLOTRON RESONANCE DISCHARGE
    PASTEL, PW
    VARHUE, WJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1129 - 1133
  • [8] Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition
    Lung, BH
    Chiang, MJ
    Hon, MH
    [J]. THIN SOLID FILMS, 2001, 392 (01) : 16 - 21
  • [9] PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION OF DIAMOND-LIKE CARBON-FILMS FROM FLUORINATED FEEDS
    DAGOSTINO, R
    LAMENDOLA, R
    FAVIA, P
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1993, 205 : 111 - POLY
  • [10] LASER-INDUCED PHYSICAL VAPOR-DEPOSITION OF DIAMOND-LIKE CARBON-FILMS
    MULLER, F
    MANN, K
    [J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) : 233 - 238
12345