PREPARATION OF DIAMOND-LIKE CARBON-FILMS BY ELECTRON-CYCLOTRON RESONANCE CHEMICAL VAPOR-DEPOSITION

被引：54
|
作者：
NAGAI, I [1 ]
ISHITANI, A [1 ]
KURODA, H [1 ]
YOSHIKAWA, M [1 ]
NAGAI, N [1 ]
机构：
[1] TORAY RES CTR LTD,OTSU,SHIGA 520,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 06期
关键词：
D O I：
10.1063/1.345428
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Diamondlike carbon films were prepared by electron cyclotron resonance chemical vapor deposition. Structures of the carbon films were characterized by Raman spectroscopy and Fourier-transform infrared spectroscopy. The relationship between the properties of films and growth conditions has been examined. High-energy ion species extracted from a discharge of methane in the electron cyclotron resonance cavity, which is positively-biased electrically against the earthed substrate, have an important role in the growth behavior of hard diamondlike carbon films.
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收藏
页码：2890 / 2893
页数：4
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