CONTROLLING THE SCHOTTKY-BARRIER HEIGHT OF TI/N-GAAS SCHOTTKY DIODE CONTAINING HYDROGEN BY BIASED ANNEALING

被引:0
|
作者
JIN, SX [1 ]
YUAN, MH [1 ]
WANG, LP [1 ]
SONG, HZ [1 ]
WANG, HP [1 ]
QIN, GG [1 ]
机构
[1] ACAD SINICA,INT CTR MAT PHYS,SHENYANG 110015,PEOPLES R CHINA
关键词
SCHOTTKY BARRIER (SB); METAL-SEMICONDUCTOR (MS) INTERFACES; HYDROGEN; ZERO BIAS ANNEALING (ZBA); REVERSE BIAS ANNEALING (RBA);
D O I
暂无
中图分类号
O29 [应用数学];
学科分类号
070104 ;
摘要
Hydrogen can decrease the Schottky barrier height (SBH) of Ti/n diodes as much as 0.18 eV. Zero bias annealing (ZBA) makes the SBHs of Ti/n-GaAs diodes containing hydrogen decrease and reverse bias annealing (RBA) makes them increase. When RBA at 100-degrees-C lasts for 2 h or more, the SBHs haw a one-to-one correlation with the biases of RBA and the larger the bias applied, the higher the SBH is.
引用
收藏
页码:730 / 737
页数:8
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