SUPERPOSITION OF AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILES OBTAINED ON CR/NI MULTILAYER SAMPLES WITH DIFFERENT ROUGHNESSES

被引：12

作者：

ZALAR, A ^{[1
]}

HOFMANN, S ^{[1
]}

机构：

[1] MAX PLANCK INST MET RES, INST WERKSTOFFWISSENSCH, D-7000 STUTTGART 80, GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574642

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1209 / 1212

页数：4

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