SUPERPOSITION OF AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILES OBTAINED ON CR/NI MULTILAYER SAMPLES WITH DIFFERENT ROUGHNESSES

被引：12

作者：

ZALAR, A ^{[1
]}

HOFMANN, S ^{[1
]}

机构：

[1] MAX PLANCK INST MET RES, INST WERKSTOFFWISSENSCH, D-7000 STUTTGART 80, GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574642

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1209 / 1212

页数：4

共 50 条

[1] THE DEPTH RESOLUTION OF COMPOSITION - DEPTH PROFILES OBTAINED BY BALL-CRATERING AND AUGER-ELECTRON SPECTROSCOPY
BROWN, IK
HALL, DD
WALLS, JM
VACUUM, 1981, 31 (10-1) : 625 - 629
[2] AUGER-ELECTRON SPECTROSCOPY COMPOSITION DEPTH PROFILING OF CR/NI MULTILAYER STRUCTURES USING AR+ AND XE+ IONS
LIDAY, J
HARMAN, R
BADIN, G
BREZA, J
ZALAR, A
THIN SOLID FILMS, 1992, 208 (02) : 290 - 294
[3] AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING OF METAL/OXIDE MULTILAYER STRUCTURES
ZALAR, A
HOFMANN, S
PANJAN, P
THIN SOLID FILMS, 1991, 206 (1-2) : 327 - 329
[4] INFORMATION DEPTH IN AUGER-ELECTRON SPECTROSCOPY
FERRON, J
GOLDBERG, EC
SURFACE SCIENCE, 1992, 275 (1-2) : 114 - 120
[5] PROGRESS IN INSTRUMENTATION, DATA REDUCTION, AND DEPTH PROFILES IN AUGER-ELECTRON SPECTROSCOPY
HOLLOWAY, PH
APPLIED SURFACE SCIENCE, 1986, 26 (04) : 550 - 560
[6] METHOD FOR THE ALIGNMENT OF SAMPLES AND THE ATTAINMENT OF ULTRA-HIGH-RESOLUTION DEPTH PROFILES IN AUGER-ELECTRON SPECTROSCOPY
HUNT, CP
SEAH, MP
SURFACE AND INTERFACE ANALYSIS, 1990, 15 (04) : 254 - 258
[7] COMPOSITIONAL DEPTH PROFILING BY AUGER-ELECTRON SPECTROSCOPY
HALL, PM
MORABITO, JM
CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1978, 8 (01): : 53 - 67
[8] ANALYSIS OF AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILES OF THE COPPER SILVER INTERFACE OF MIRRORS
DAKE, LS
HARTMAN, JS
SOLAR ENERGY MATERIALS, 1983, 9 (01): : 43 - 50
[9] PROBING DEPTH IN PHOTOEMISSION AND AUGER-ELECTRON SPECTROSCOPY
LINDAU, I
SPICER, WE
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 3 (05) : 409 - 413
[10] AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING OF NI-CR MULTILAYERS BY SPUTTERING WITH N-2+ IONS
HOFMANN, S
ZALAR, A
THIN SOLID FILMS, 1979, 60 (02) : 201 - 211

← 1 2 3 4 5 →