INITIAL SOLID-STATE REACTIONS BETWEEN CRYSTALLINE SB AND AMORPHOUS SI THIN-FILMS

被引：35
|
作者：
GONG, SF
HENTZELL, HTG
ROBERTSSON, AE
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期
关键词：
D O I：
10.1063/1.341817
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1457 / 1463
页数：7
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