FORMATION OF CERAMIC THIN-FILMS BY SOLID-STATE INTERFACE REACTIONS

被引：35

|

作者：

HESSE, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574556

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：1696 / 1702

页数：7

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