INITIAL SOLID-STATE REACTIONS BETWEEN CRYSTALLINE SB AND AMORPHOUS SI THIN-FILMS

被引：35

|

作者：

GONG, SF

HENTZELL, HTG

ROBERTSSON, AE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.341817

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1457 / 1463

页数：7

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