A DETAILED ANALYSIS OF THE OPTICAL BEAM DEFLECTION TECHNIQUE FOR USE IN ATOMIC FORCE MICROSCOPY

被引：197
|
作者：
PUTMAN, CAJ
DEGROOTH, BG
VANHULST, NF
GREVE, J
机构：
[1] Department of Applied Physics, University of Twente, 7500 AE Enschede
来源：
JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 01期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.352149
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A Michelson interferometer and an optical beam deflection configuration (both shot noise and diffraction limited) are compared for application in an atomic force microscope. The comparison shows that the optical beam deflection method and the interferometer have essentially the same sensitivity. This remarkable result is explained by indicating the physical equivalence of both methods. Furthermore, various configurations using optical beam deflection are discussed. All the setups are capable of detecting the cantilever displacements with atomic resolution in a 10 kHz bandwidth.
引用
收藏
页码：6 / 12
页数：7
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