LAYER-BY-LAYER DEPOSITION OF MULTILAYER BI-SR-CA-CU-O/BI-SR-CU-O

被引：0
|
作者：
WASA, K
MATSUSHIMA, T
SETSUNE, K
机构：
[1] Matsushita Electric Ind Co Ltd, Moriguchi, 570
来源：
VACUUM | 1992年 / 43卷 / 11期
关键词：
D O I：
10.1016/0042-207X(92)90321-M
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Multilayered superlattice, superconductors/semiconductors, Bi-2212(Bi2Sr2Ca1Cu2Ox)/Bi-2201(Bi2Sr2Cu1Oy), have been made by rf-magnetron sputtering. Minimum film thickness under controlled chemical composition and structure is around a haff crystal unit. The Bi-O layers will act as a diffusion barrier towards the c-axis and stabilize the Bi-layered structure.
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页码：1027 / 1029
页数：3
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