LOW-TEMPERATURE ANNEALING EFFECT ON BI-SR-CA-CU-O THIN-FILMS PREPARED BY LAYER-BY-LAYER DEPOSITION

被引:8
|
作者
TSUKAMOTO, A
IMAGAWA, K
HIRATANI, M
KANEHORI, K
TAKAGI, K
机构
[1] Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo
来源
关键词
SUPERCONDUCTOR; THIN FILM; REACTIVE EVAPORATION; BI-SR-CA-CU-O; LAYER-BY-LAYER DEPOSITION;
D O I
10.1143/JJAP.30.L830
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of Bi-Sr-Ca-Cu-O superconductors are prepared by layer-by-layer deposition using automatically controlled shutters. The films are deposited by microwave-discharged plasma assisted reactive evaporation. The thin films of the 2201 phase, 2212 phase, and 2223 phase are obtained in accordance with respective shuttering sequences. As-grown films do not show superconductivity, because of excess oxygen content. Superconducting thin films of the 2212 phase with zero resistance at 40 K are obtained by low-temperature annealing at 550-degrees-C in an oxygen partial pressure of 0.1 atm.
引用
收藏
页码:L830 / L833
页数:4
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