COLD-CATHODE GAS-DISCHARGE ION-SOURCE

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作者：
ZHURAVLEV, BI
NIKITINSKII, VA
GAPONENKO, AT
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INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1985年 / 28卷 / 04期
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T [工业技术];
学科分类号：
08 ;
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页码：907 / 909
页数：3
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