DEVELOPMENT OF ERC COLD-CATHODE ION-SOURCE FOR USE ON PR-30 ION-IMPLANTATION SYSTEM

被引：7
|
作者：
BIRD, HMB
FLEMMING, JP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期
关键词：
D O I：
10.1116/1.569739
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1070 / 1075
页数：6
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