A COLD-CATHODE ION-SOURCE WITH A MAGNETIC HOLLOW-CATHODE

被引：4
|
作者：
KERKOW, H
BOUBETRA, D
HOLLDACK, K
机构：
[1] Humboldt-University Berlin, Department of Physics, O- 1040 Berlin
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 68卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(92)96047-3
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new concept of effective plasma generation from a cold cathode discharge could be developed, which is based on a hollow cathode in combination with a special geometry of a magnetic field inside. In principle, inside a cavity the electric field from the anode is crossed by the magnetic field at well defined positions. By the resulting cycloidal motion of the electrons the ionization probability of the electrons per unit length can be enhanced. In this way the typical working pressure and the gas consumption of several ion sources can be significantly improved using the so called magnetic hollow cathode (MHC) as a module.
引用
下载
收藏
页码：41 / 44
页数：4
相关论文
共 50 条
  • [1] A HOLLOW COLD-CATHODE MULTIPURPOSE ION-SOURCE
    MA, MX
    LI, JP
    ZHOU, FS
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 182 - 185
  • [2] COLD-CATHODE ION-SOURCE
    TROFIMOV, AV
    CHUTKO, VM
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1988, 31 (02) : 403 - 406
  • [3] HOLLOW-CATHODE MAGNETRON ION-SOURCE
    MILJEVIC, V
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (01): : 121 - 123
  • [4] SIMPLE HOLLOW-CATHODE ION-SOURCE
    TONEGAWA, A
    YABE, E
    SATOH, D
    SUNAKO, K
    TAKAYAMA, K
    TAKAGI, K
    FUKUI, R
    OKAMOTO, K
    KOMIYA, S
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2): : 129 - 132
  • [5] HOLLOW-CATHODE ION-SOURCE FOR APPLICATION TO AN IMPLANTER
    TONEGAWA, A
    YABE, E
    SATOH, D
    TAKAYAMA, K
    TAKAGI, K
    FUKUI, R
    WATANABE, K
    OKAMOTO, K
    KOMIYA, S
    VACUUM, 1986, 36 (1-3) : 15 - 18
  • [6] BAKEABLE HOLLOW-CATHODE DUOPLASMATRON ION-SOURCE
    SCHNITZER, R
    ENGESSER, FC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1976, 47 (09): : 1219 - 1221
  • [7] EFFECT OF MAGNETIC-FIELD ON THE CHARACTERISTICS OF A HOLLOW-CATHODE ION-SOURCE
    TANAKA, S
    AKIBA, M
    HORIIKE, H
    OKUMURA, Y
    OHARA, Y
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (09): : 1104 - 1112
  • [8] QUICK CHANGE AXIAL COLD-CATHODE ION-SOURCE
    MALLORY, ML
    MILLER, PS
    CHIEN, WS
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1977, 24 (03) : 1593 - 1593
  • [9] COLD-CATHODE GAS-DISCHARGE ION-SOURCE
    ZHURAVLEV, BI
    NIKITINSKII, VA
    GAPONENKO, AT
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1985, 28 (04) : 907 - 909
  • [10] COLD-CATHODE ION-SOURCE FOR MASS-SPECTROMETRY
    SWINGLER, DL
    INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1980, 33 (01): : 57 - 62
12345