DEVELOPMENT OF ERC COLD-CATHODE ION-SOURCE FOR USE ON PR-30 ION-IMPLANTATION SYSTEM

被引：7
|
作者：
BIRD, HMB
FLEMMING, JP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期
关键词：
D O I：
10.1116/1.569739
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1070 / 1075
页数：6
相关论文
共 50 条
  • [21] DESIGN OF AN ION-SOURCE FOR THE ION-IMPLANTATION OF TEXTILE POLYMERS
    BEAN, RA
    POSTLE, R
    KELLY, JC
    JOURNAL OF THE TEXTILE INSTITUTE, 1992, 83 (02) : 275 - 278
  • [22] An ion-source of ceramic construction suitable for ion-implantation
    Virdi, GS
    VACUUM, 2001, 64 (01) : 37 - 40
  • [23] USE OF A METALLIC ION-SOURCE IN COLD CATHODE SPUTTER ION PUMPS
    TOM, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 383 - &
  • [24] LOW BACKGROUND COLD-CATHODE ION-SOURCE FOR MOLECULAR-BEAM DETECTION
    FAUBEL, M
    HOLBER, WM
    TOENNIES, JP
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (04): : 449 - 451
  • [25] COLD-CATHODE ION-SOURCE FOR SPUTTERED NEUTRAL MASS-SPECTROMETRY OF METALS
    SWINGLER, DL
    ORGANIC MASS SPECTROMETRY, 1991, 26 (04): : 257 - 260
  • [26] A HIGH-CURRENT MICROWAVE ION-SOURCE FOR ION-IMPLANTATION
    WALTHER, SR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2562 - 2564
  • [27] ERC MARK-I ION-IMPLANTATION SYSTEM
    RODDE, AF
    JACKSON, JH
    MCCALLUM, JG
    MOSTEK, PJ
    ROBERTSON, GI
    WEISSMAN, B
    WILLIAMS, N
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (03) : C109 - C109
  • [28] ROTATABLE COLD CATHODE PENNING ION-SOURCE
    MALLORY, ML
    HUDSON, ED
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (02): : 195 - 195
  • [29] CHARACTERIZATION OF A BERNAS ION-SOURCE FOR MULTIPLY-CHARGED ION-IMPLANTATION
    WALTHER, SR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1307 - 1309
  • [30] ROTATABLE COLD CATHODE PENNING ION-SOURCE
    MALLORY, ML
    HUDSON, ED
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, NS22 (03) : 1669 - 1671
12345