OLIGOORGANYLSILSESQUIOXANES - RADIATION-SENSITIVE SUBSTANCES FOR VACUUM MICROLITHOGRAPHY

被引：0
|
作者：
KORCHKOV, VP
MARTYNOVA, TN
机构：
来源：
JOURNAL OF APPLIED CHEMISTRY OF THE USSR | 1985年 / 58卷 / 09期
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：1923 / 1928
页数：6
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