CURRENT METHODS FOR SILICON-WAFER CHARACTERIZATION

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作者：

MATLOCK, JH

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来源：

SOLID STATE TECHNOLOGY | 1983年 / 26卷 / 11期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

9

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页码：111 / 116

页数：6

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