UNIFORMITY OF SILICON STRUCTURES BY MEANS OF THE PHOTO-VOLTAGE

被引：0
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作者：
PATRIN, AA
SERNOV, SP
机构：
来源：
SOVIET MICROELECTRONICS | 1982年 / 11卷 / 05期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：238 / 241
页数：4
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