UNIFORMITY OF SILICON STRUCTURES BY MEANS OF THE PHOTO-VOLTAGE

被引：0

作者：

PATRIN, AA

SERNOV, SP

机构：

来源：

SOVIET MICROELECTRONICS | 1982年 / 11卷 / 05期

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暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：238 / 241

页数：4

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