DRAWN PITCH THREADS AS MASKS FOR MICROFABRICATION

被引：1
|
作者：
SHEEM, S [1 ]
机构：
[1] UNIV CALIF,DEPT ELECT ENGN & COMP SCI,ELECTR RES LAB,BERKELEY,CA 94720
来源：
APPLIED OPTICS | 1974年 / 13卷 / 08期
关键词：
D O I：
10.1364/AO.13.001757
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：1757 / 1759
页数：3
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