FOCUSED ION-BEAM MILLING

被引：23
|
作者：
WATKINS, REJ [2 ]
ROCKETT, P
THOMS, S
CLAMPITT, R
SYMS, R
机构：
[1] UNIV OXFORD,RUTHERFORD APPLETON LAB,OXFORD,ENGLAND
[2] UNIV OXFORD,DEPT ENGN SCI,OXFORD,ENGLAND
[3] OXFORD APPL RES,WITNEY,OXON,ENGLAND
来源：
VACUUM | 1986年 / 36卷 / 11-12期
关键词：
D O I：
10.1016/0042-207X(86)90148-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：961 / 967
页数：7
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