VARIATIONS OF ELECTRON TRAPS IN BULK N-GAAS BY RAPID THERMAL-PROCESSING

被引:20
|
作者
KATAYAMA, M [1 ]
USAMI, A [1 ]
WADA, T [1 ]
TOKUDA, Y [1 ]
机构
[1] AICHI INST TECHNOL,DEPT ELECTR,YAKUSA,TOYOTA 47003,JAPAN
关键词
D O I
10.1063/1.339778
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:528 / 533
页数:6
相关论文
共 50 条
  • [21] RAPID THERMAL-PROCESSING WITH REACTIVE GASES
    NULMAN, J
    [J]. REDUCED THERMAL PROCESSING FOR ULSI, 1989, 207 : 1 - 52
  • [22] GETTERING OF GOLD BY RAPID THERMAL-PROCESSING
    HARTITI, B
    VUTHUONGQUAT
    EICHHAMMER, W
    MULLER, JC
    SIFFERT, P
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (09) : 873 - 875
  • [23] RAPID THERMAL-PROCESSING FOR SILICIDE TECHNOLOGY
    TSUKAMOTO, K
    SHIMIZU, M
    OKAMOTO, T
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : C133 - C133
  • [24] RAPID THERMAL-PROCESSING IN SEMICONDUCTOR TECHNOLOGY
    HART, MJ
    EVANS, AGR
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1988, 3 (05) : 421 - 436
  • [25] TRANSIENT EFFECTS IN RAPID THERMAL-PROCESSING
    CAMPBELL, SA
    KNUTSON, KL
    [J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1992, 5 (04) : 302 - 307
  • [26] RAPID THERMAL-PROCESSING FOR VLSI APPLICATION
    WIESER, E
    GERISCH, D
    KAHLERT, V
    [J]. EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 80 - 86
  • [27] THERMAL-STABILITY OF OHMIC CONTACTS TO N-GAAS FORMED BY SCANNED ELECTRON-BEAM PROCESSING
    PRASAD, K
    FARAONE, L
    NASSIBIAN, AG
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (04): : 618 - 624
  • [28] The effect of ultrasonic treatment on the energy spectrum of electron traps in n-GaAs single crystals
    F. S. Gabibov
    E. M. Zobov
    M. E. Zobov
    S. P. Kramynin
    E. G. Pashuk
    Sh. A. Khalilov
    [J]. Technical Physics Letters, 2015, 41 : 362 - 365
  • [29] PRODUCTION OF THE MIDGAP ELECTRON TRAP (EL2) IN MOLECULAR-BEAM-EPITAXIAL GAAS BY RAPID THERMAL-PROCESSING
    KITAGAWA, A
    USAMI, A
    WADA, T
    TOKUDA, Y
    KANO, H
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (03) : 1215 - 1217
  • [30] The Effect of Ultrasonic Treatment on the Energy Spectrum of Electron Traps in n-GaAs Single Crystals
    Gabibov, F. S.
    Zobov, E. M.
    Zobov, M. E.
    Kramynin, S. P.
    Pashuk, E. G.
    Khalilov, Sh. A.
    [J]. TECHNICAL PHYSICS LETTERS, 2015, 41 (04) : 362 - 365