SECONDARY ION MASS-SPECTROMETRY PROFILING OF SHALLOW, IMPLANTED LAYERS USING QUADRUPOLE AND MAGNETIC-SECTOR INSTRUMENTS

被引：73
|
作者：
VANDERVORST, W [1 ]
SHEPHERD, FR [1 ]
机构：
[1] BELL NO RES,OTTAWA K1Y 4H7,ONTARIO,CANADA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期
关键词：
D O I：
10.1116/1.574152
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：313 / 320
页数：8
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