PRESSURE-DEPENDENCE OF ELECTRON-TEMPERATURE USING RF-FLOATED ELECTROSTATIC PROBES IN RF PLASMAS

被引：30

作者：

CANTIN, A ^{[1
]}

GAGNE, RRJ ^{[1
]}

机构：

[1] UNIV LAVAL,DEPT ELECT ENGN,QUEBEC CITY 10,QUEBEC,CANADA

来源：

APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 07期

关键词：

D O I：

10.1063/1.89406

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：316 / 319

页数：4

共 50 条

[1] RF-FLOATED ELECTROSTATIC PROBES IN RF-PRODUCED PLASMAS
GAGNE, RRJ
CANTIN, A
[J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (05): : 812 - 812
[2] RIPPLE OF ELECTRON-TEMPERATURE IN RF PLASMAS
TAKEDA, S
HAYASHI, Y
MORI, H
[J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1988, 57 (09) : 3036 - 3042
[3] PROPER USE OF ELECTROSTATIC PROBES IN ELECTRODELESS RF PLASMAS
CANTIN, A
GAGNE, RRJ
[J]. IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1968, AP16 (02) : 279 - &
[4] PRESSURE-DEPENDENCE OF THE ELECTRICAL POTENTIAL AND ELECTRON-TEMPERATURE IN A MICROWAVE-GENERATED PLASMA
ISMAIL, LZ
ELMAGD, AA
[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1992, 20 (02) : 57 - 61
[5] ELECTRON-TEMPERATURE AND DENSITY IN RF DISCHARGE IN DRY AIR
DESHMUKH, SV
[J]. INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1977, 15 (12) : 854 - 857
[6] PRESSURE-DEPENDENCE OF THE MEAN ELECTRON-ENERGY IN THE BULK PLASMA OF AN RF DISCHARGE IN ARGON
SEEBOCK, RJ
KOHLER, WE
ROMHELD, M
[J]. CONTRIBUTIONS TO PLASMA PHYSICS, 1992, 32 (06) : 613 - 622
[7] PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE
GODYAK, VA
PIEJAK, RB
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (23) : 3137 - 3139
[8] Observation of Pressure-Dependence in RF-Modulated Electron Beam Interactions With a Resonant Cylindrical Cavity
Connelly, Joseph M.
Harris, John R.
Watrous, J. Jack
Sommars, Wayne E.
Lockwood, Nathaniel P.
[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2022, 50 (09) : 2877 - 2885
[9] BEHAVIOR OF ELECTROSTATIC DOUBLE PROBES IN PLASMAS WITH HIGH-AMPLITUDE RF FIELDS
STAMPA, A
WULF, HO
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1978, 11 (07) : 1119 - &
[10] THE DEPENDENCE OF COATING IN INDUCTIVE RF PLASMAS ON GAS-FLOW VELOCITY, PRESSURE AND RF POWER
KHAIT, YL
INSPEKTOR, A
AVNI, R
[J]. THIN SOLID FILMS, 1980, 72 (02) : 249 - 260

← 1 2 3 4 5 →