RF-FLOATED ELECTROSTATIC PROBES IN RF-PRODUCED PLASMAS

被引：0

作者：

GAGNE, RRJ ^{[1
]}

CANTIN, A ^{[1
]}

机构：

[1] LAVAL UNIV,LAVAL,QUEBEC,CANADA

来源：

BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1976年 / 21卷 / 05期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：812 / 812

页数：1

共 50 条

[1] PRESSURE-DEPENDENCE OF ELECTRON-TEMPERATURE USING RF-FLOATED ELECTROSTATIC PROBES IN RF PLASMAS
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[J]. APPLIED PHYSICS LETTERS, 1977, 30 (07) : 316 - 319
[2] PROPER USE OF ELECTROSTATIC PROBES IN ELECTRODELESS RF PLASMAS
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