RF-FLOATED ELECTROSTATIC PROBES IN RF-PRODUCED PLASMAS

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作者
GAGNE, RRJ [1 ]
CANTIN, A [1 ]
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[1] LAVAL UNIV,LAVAL,QUEBEC,CANADA
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O4 [物理学];
学科分类号
0702 ;
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页码:812 / 812
页数:1
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