RIPPLE OF ELECTRON-TEMPERATURE IN RF PLASMAS

被引：2
|
作者：
TAKEDA, S
HAYASHI, Y
MORI, H
机构：
来源：
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1988年 / 57卷 / 09期
关键词：
D O I：
10.1143/JPSJ.57.3036
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：3036 / 3042
页数：7
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