RIPPLE OF ELECTRON-TEMPERATURE IN RF PLASMAS

被引:2
|
作者
TAKEDA, S
HAYASHI, Y
MORI, H
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关键词
D O I
10.1143/JPSJ.57.3036
中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:3036 / 3042
页数:7
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