RF-SPUTTERED INDIUM TIN OXIDE-FILMS ON WATER-COOLED SUBSTRATES

被引：28
|
作者：
MANSINGH, A
KUMAR, CVRV
机构：
来源：
THIN SOLID FILMS | 1988年 / 167卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(88)90511-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L11 / L13
页数：3
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