ETCHING METHODS FOR INDIUM OXIDE-TIN OXIDE-FILMS

被引：42

作者：

BRADSHAW, G ^{[1
]}

HUGHES, AJ ^{[1
]}

机构：

[1] ROY RADAR ESTAB,MALVERN WR14 3PS,WORCESTERSHIRE,ENGLAND

来源：

THIN SOLID FILMS | 1976年 / 33卷 / 02期

关键词：

D O I：

10.1016/0040-6090(76)90087-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L5 / L8

页数：4

共 50 条

[1] CHARACTERIZATION OF INDIUM TIN OXIDE-FILMS
MURALI, KR
SAMBASIVAM, V
JAYACHANDRAN, M
CHOCKALINGAM, MJ
RANGARAJAN, N
VENKATESAN, VK
[J]. SURFACE & COATINGS TECHNOLOGY, 1988, 35 (1-2): : 207 - 213
[2] CVD OF INDIUM TIN OXIDE-FILMS
RANADIVE, DK
SMITH, FTJ
KHOSLA, RP
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C299 - C299
[3] ELECTRIC RESISTIVITY OF INDIUM(III) OXIDE-TIN(IV) OXIDE-FILMS PREPARED BY THERMAL-DECOMPOSITION OF INDIUM(III) NITRATE AND TIN(IV) NITRATE
OGIHARA, S
KINUGAWA, K
NAKAYAMA, M
[J]. NIPPON KAGAKU KAISHI, 1980, (09) : 1345 - 1351
[4] INDIUM TIN OXIDE-FILMS BY SEQUENTIAL EVAPORATION
YAO, JL
HAO, S
WILKINSON, JS
[J]. THIN SOLID FILMS, 1990, 189 (02) : 227 - 233
[5] PREPARATION OF INDIUM TIN OXIDE-FILMS BY VACUUM EVAPORATION
CHEN, Z
YANG, KY
WANG, JQ
[J]. THIN SOLID FILMS, 1988, 162 (1-2) : 305 - 313
[6] THERMOELECTRIC-POWER OF INDIUM TIN OXIDE-FILMS
TREFNY, J
MITRA, N
[J]. THIN SOLID FILMS, 1988, 157 (01) : 7 - 12
[7] SOME PROPERTIES OF INDIUM-TIN OXIDE-FILMS
RADHAKRISHNA, MC
RAO, MR
[J]. PRAMANA, 1977, 9 (01) : 1 - 6
[8] ELECTRICAL-PROPERTIES OF VACUUM-DEPOSITED INDIUM OXIDE AND INDIUM TIN OXIDE-FILMS
MIZUHASHI, M
[J]. THIN SOLID FILMS, 1980, 70 (01) : 91 - 100
[9] SPUTTERED CADMIUM OXIDE AND INDIUM OXIDE TIN OXIDE-FILMS AS TRANSPARENT ELECTRODES TO CADMIUM SULFIDE
MEHTA, RR
VOGEL, SF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (06) : 752 - &
[10] DOPING MECHANISMS OF TIN-DOPED INDIUM OXIDE-FILMS
SHIGESATO, Y
HAYASHI, Y
HARANOH, T
[J]. APPLIED PHYSICS LETTERS, 1992, 61 (01) : 73 - 75

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