TRAP GENERATION IN OXIDIZED SILICON-WAFERS BY RAPID THERMAL ANNEALING

被引：0

|

作者：

VASUDEV, PK

HENDERSON, RC

CAPLAN, PJ

POINDEXTER, EH

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

[2] ELECTR TECHNOL & DEVICES LAB,FT MONMOUTH,NJ 07703

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：C330 / C330

页数：1

相关论文

共 50 条

[1] THERMAL ANNEALING OF SILICON-WAFERS FOR INTRINSIC GETTERING
DARAGONA, FS
TSUI, RK
LIAW, HM
FEJES, PL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : C239 - C239
[2] TEMPERATURE TRANSIENTS OF ION-IMPLANTED SILICON-WAFERS DURING RAPID THERMAL ANNEALING
UOOCHI, Y
SHIOYA, Y
MAEDA, M
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8A) : 2007 - 2010
[3] SENSITIVITY ANALYSIS OF ION-IMPLANTED SILICON-WAFERS AFTER RAPID THERMAL ANNEALING
KIM, YT
JUN, CH
BAEK, JT
YOO, HJ
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1995, 24 (10) : 1413 - 1417
[4] PHYSISORPTION OF KRYPTON ON THERMALLY OXIDIZED SILICON-WAFERS
BOHRA, JN
JOHN, PT
SAXENA, RK
[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1993, 12 (17) : 1362 - 1364
[5] RAPID ISOTHERMAL PROCESSING OF SILICON-WAFERS
GILL, SS
[J]. PHYSICS IN TECHNOLOGY, 1986, 17 (06): : 245 - &
[6] DEFECTS INTRODUCED IN SILICON-WAFERS DURING RAPID ISOTHERMAL ANNEALING - THERMOELASTIC AND THERMOPLASTIC EFFECTS
BENTINI, G
CORRERA, L
DONOLATO, C
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (10) : 2922 - 2929
[7] LASER-DYE IMPREGNATION OF OXIDIZED POROUS SILICON ON SILICON-WAFERS
CANHAM, LT
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (03) : 337 - 339
[8] SILICON-WAFERS
VANHOY, GA
[J]. MACHINE DESIGN, 1994, 66 (20) : 139 - 139
[9] BONDING SILICON-WAFERS BY USE OF ELECTROSTATIC FIELDS FOLLOWED BY RAPID THERMAL HEATING
LU, D
WORTMAN, JJ
FATHY, D
[J]. MATERIALS LETTERS, 1986, 4 (11-12) : 461 - 464
[10] DENUDED ZONE AND MICRODEFECT FORMATION IN CZOCHRALSKI-GROWN SILICON-WAFERS BY THERMAL ANNEALING
KUGIMIYA, K
AKIYAMA, S
NAKAMURA, S
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : C94 - C94

← 1 2 3 4 5 →