INTERNATIONAL STANDARDS FOR SEMICONDUCTOR-MATERIALS

被引：0

作者：

BAYLIES, WA

SCACE, RI

VIEWEGGUTBERLET, F

机构：

[1] ADE CORP,NEWTOWN,MA

[2] NBS,DIV SEMICOND MAT & PROC,WASHINGTON,DC 20234

[3] WACKER CHEMITRON GMBH,BURGHAUSEN,FED REP GER

来源：

ASTM STANDARDIZATION NEWS | 1983年 / 11卷 / 05期

关键词：

D O I：

暂无

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

引用

页码：21 / 23

页数：3

共 50 条

[21] ELECTRICAL CHARACTERIZATION OF SEMICONDUCTOR-MATERIALS
MILLER, GL
ROBINSON, DAH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C135 - C135
[22] HELIUM MICROPROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS
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[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1228 - 1231
[23] STM APPLICATIONS FOR SEMICONDUCTOR-MATERIALS AND DEVICES
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[J]. SURFACE SCIENCE, 1987, 181 (1-2) : 285 - 294
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[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1978, 25 (02) : 921 - 926
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[J]. ACS SYMPOSIUM SERIES, 1986, 295 : 18 - 33
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[27] SEMICONDUCTOR-MATERIALS FROM PYROLYSIS OF POLYPHENYLENES
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[J]. ONDE ELECTRIQUE, 1995, 75 (03): : 13 - 19
[29] THE CHARACTERIZATION OF SEMICONDUCTOR-MATERIALS BY BACKSCATTERING SPECTROSCOPY
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY): : 583 - 587
[30] SEMICONDUCTOR-MATERIALS FOR FUTURE DISPLAY DEVICES
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[J]. ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1976, 3 (02): : 67 - 75

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