HELIUM MICROPROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS

被引：8
|
作者：
MCCALLUM, JC [1 ]
MCKENZIE, CD [1 ]
机构：
[1] ROYAL MELBOURNE INST TECHNOL,DEPT COMMUNICAT & ELECTR ENGN,MELBOURNE,VIC 3000,AUSTRALIA
来源：
IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1983年 / 30卷 / 02期
关键词：
D O I：
10.1109/TNS.1983.4332495
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1228 / 1231
页数：4
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