APPLICATION OF THE ELECTRONIC MICRO-ANALYZER TO MEASUREMENT OF THE THICKNESS OF THIN-FILMS

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作者：

TONNERRE, JC

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REVUE TECHNIQUE THOMSON-CSF | 1984年 / 16卷 / 04期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：773 / 789

页数：17

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