AUTOMATIC-MEASUREMENT OF THICKNESS AND UNIFORMITY OF THIN-FILMS BY A COMPUTER-AIDED DEVICE

被引：3
|
作者：
DELLERA, P [1 ]
GADIOLI, E [1 ]
GUAZZONI, P [1 ]
VERGANI, P [1 ]
ZETTA, L [1 ]
机构：
[1] IST NAZL FIS NUCL,I-20133 MILAN,ITALY
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1993年 / 334卷 / 01期
关键词：
D O I：
10.1016/0168-9002(93)90554-U
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A computer aided vacuum chamber for the automatic determination of thickness and uniformity of tip to 44 thin films (on a frame of 50 x 50 mm2) using the energy loss method is described.
引用
收藏
页码：211 / 216
页数：6
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