AUTOMATIC-MEASUREMENT OF THICKNESS AND UNIFORMITY OF THIN-FILMS BY A COMPUTER-AIDED DEVICE

被引：3

作者：

DELLERA, P ^{[1
]}

GADIOLI, E ^{[1
]}

GUAZZONI, P ^{[1
]}

VERGANI, P ^{[1
]}

ZETTA, L ^{[1
]}

机构：

[1] IST NAZL FIS NUCL,I-20133 MILAN,ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1993年 / 334卷 / 01期

关键词：

D O I：

10.1016/0168-9002(93)90554-U

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A computer aided vacuum chamber for the automatic determination of thickness and uniformity of tip to 44 thin films (on a frame of 50 x 50 mm2) using the energy loss method is described.

引用

页码：211 / 216

页数：6

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