REMOTE ULTRASONIC MEASUREMENT OF THE THICKNESS OF THIN-FILMS

被引：0

|

作者：

LEFEBVRE, JE ^{[1
]}

BRUNEEL, C ^{[1
]}

DELEBARRE, C ^{[1
]}

LUTGEN, P ^{[1
]}

ECKER, T ^{[1
]}

机构：

[1] DUPONT NEMOURS SA,F-2984 LUXEMBOURG,FRANCE

来源：

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA | 1988年 / 84卷 / 03期

关键词：

D O I：

10.1121/1.396695

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

收藏

页码：1094 / 1096

页数：3

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