共 50 条
- [33] Thermal dry-etching of nickel using oxygen and 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (Hhfac) 2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2016, : 135 - 138
- [34] Sublimation enthalpy of tetrakis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)lanthanide(III)-potassium complexes, KLn(C5HF6O2)4: Effect of lanthanide contraction JOURNAL OF CHEMICAL THERMODYNAMICS, 2019, 131 : 117 - 121
- [35] Thermal dry-etching of nickel using oxygen and 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (Hhfac) 1600, Institute of Electrical and Electronics Engineers Inc., United States
- [36] Chemistry of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione on Si(100)-2x1 JOURNAL OF PHYSICAL CHEMISTRY B, 2006, 110 (29): : 14337 - 14344
- [37] Chemical vapor etching of copper using oxygen and 1,1,1,5,5,5-hexafluoro-2,4-pentanedione Thin Solid Films, 1 (221-229):