共 50 条
- [2] DEPENDENCE OF LASER-INDUCED DAMAGE THRESHOLD OF ANTIREFLECTION COATINGS ON SUBSTRATE SURFACE-ROUGHNESS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (08): : 1256 - 1261
- [5] A LASER HETERODYNE INTERFEROMETER FOR MEASURING SURFACE-ROUGHNESS OPTICAL MICROLITHOGRAPHY AND METROLOGY FOR MICROCIRCUIT FABRICATION, 1989, 1138 : 178 - 179
- [7] ONLINE MONITORING OF SURFACE-ROUGHNESS BY USING LASER PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 508 : 56 - 63
- [10] A TECHNIQUE FOR RAPIDLY MEASURING SURFACE-ROUGHNESS USING A LASER JSME INTERNATIONAL JOURNAL SERIES I-SOLID MECHANICS STRENGTH OF MATERIALS, 1992, 35 (03): : 335 - 339