DISTRIBUTION OF RADIATION-DAMAGE RATE WITH DEPTH IN SILICON BOMBARDED WITH HIGH-ENERGY ELECTRONS

被引:8
|
作者
YASUDA, K
MASUDA, H
TAKEDA, M
WADA, T
机构
[1] GOVT IND RES INST,KITA KU,NAGOYA 462,JAPAN
[2] MIE UNIV,FAC ENGN,DEPT ELECT ENGN,TSU 514,JAPAN
关键词
D O I
10.1143/JJAP.16.387
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:387 / 388
页数:2
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