CHEMISTRY OF POLYMERIC RESISTS USEFUL IN MICROLITHOGRAPHY

被引：7
|
作者：
LEDWITH, A
机构：
来源：
IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION | 1983年 / 130卷 / 05期
关键词：
D O I：
10.1049/ip-i-1.1983.0043
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
LITHOGRAPHY
引用
收藏
页码：245 / 251
页数：7
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