RECENT TRENDS IN DEVICE FABRICATION USING ION-IMPLANTATION

被引：0
|
作者：
SCHWETTMANN, FN [1 ]
机构：
[1] TEXAS INSTR INC,CENT RES LABS,DALLAS,TX 75222
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期
关键词：
D O I：
10.1116/1.568926
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：390 / 390
页数：1
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