LITHOGRAPHY FOR ULTRA-SUBMICRON DEVICE STRUCTURES

被引：0
|
作者：
COOK, CF
AUCOIN, TF
IAFRATE, GJ
机构：
[1] USA,COMMAND LAB,ADV SEMICOND TECHNOL BRANCH,FT MONMOUTH,NJ 07703
[2] USA,COMMAND LAB,ELECTR TECHNOL & DEVICES LAB,DIV ELECTR MAT RES,FT MONMOUTH,NJ 07703
来源：
SOLID STATE TECHNOLOGY | 1985年 / 28卷 / 10期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：125 / 129
页数：5
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